改变过渡层碳靶功率在铜上沉积类金刚石膜的研究

doi:10.3969/j.issn.1006-396X.2015.03.019

石油化工高等学校学报 ›› 2015, Vol. 28 ›› Issue (3): 91-96.DOI: 10.3969/j.issn.1006-396X.2015.03.019

• 化工机械 • 上一篇

改变过渡层碳靶功率在铜上沉积类金刚石膜的研究

王宁^{1, 2}, 王静², 郑福卫³, 武玉民¹, 侯保荣²

( 1. 青岛科技大学化工学院, 山东青岛2 6 6 0 4 2; 2. 中国科学院海洋研究所海洋环境腐蚀与生物污损重点实验室,
山东青岛2 6 6 0 7 1; 3. 青岛科技大学化学与分子工程学院, 山东青岛2 6 6 0 4 2)

收稿日期:2015-01-12 修回日期:2015-04-09 出版日期:2015-06-25 发布日期:2015-06-23
通讯作者: 王静( 1 9 8 0 - ) , 女, 博士, 副研究员, 从事金属腐蚀与防护、金属表面功能材料的制备; E - m a i l : j w a n g 0 5 0 1@1 2 6.c o m。
作者简介:王宁( 1 9 8 8 - ) , 男, 硕士研究生, 从事金属材料腐蚀与防护研究; E - m a i l : w n 8 8 1 0 3 0@1 6 3. c o m。
基金资助:
国家海洋腐蚀防护工程技术研究中心资助( 2 0 1 1 FU 1 2 5 X 1 3) 。

DiamondLike Carbon Film Deposited on Copper Substrate by Changing Intermediate C Target Power

（1. College of Chemical Engineering,Qingdao University of Science and Technology,Qingdao Shandong 266042,China; 2. Key Laboratory of Marine Environmental Corrosion and BioFouling, Institute of Oceanology,Chinese Academy of Sciences, Qingdao Shandong 266071, China; 3.College of Chemistry and Molecular Engineering,Qingdao University of Science and Technology, Qingdao Shandong 266042,China）

Received:2015-01-12 Revised:2015-04-09 Published:2015-06-25 Online:2015-06-23

摘要/Abstract

摘要： 类金刚石膜具有硬度高、摩擦系数低、耐腐性强、稳定性高等优点, 是提高铜耐腐性的理想材料, 但铜与类金刚石膜之间的结合力差。通过制备T i xC y 过渡层, 采用磁控溅射物理气相沉积与化学气相沉积法, 通过改变过渡层碳靶功率成功在铜基体上沉积类金刚石膜。并对金刚石膜进行拉曼光谱测试、划痕实验和电化学实验分析。结果表明, 所制备碳膜具有典型的类金刚石结构, 膜与基体之间的结合强度大, 过渡层碳靶溅射功率为2 0 0W 时所制备的类金刚石膜对铜基体的保护作用最好。

关键词: 铜基体, 类金刚石膜, 拉曼光谱, 划痕法, 耐腐蚀性

Abstract: Diamondlike carbon (DLC) films have good properties, such as high hardness, low friction coefficient, high stability, and so on, which make it the ideal material for copper corrosionresistance. But, the coherence between film and copper substrate was bad. Thus, we make TixCy intermediate layer to resolve this problem. DLC films were successfully grown on copper substrate by changing C target power of intermediate layer ,combining magnetosputtering physical vapor deposition with chemical vapor deposition. Ranman spectroscopy result indicated that the films show an amorphous structure and typical characteristics of DLC films. The coherence between film and copper substrate was analyzed by Indentation method, which indicate the tight coherence. Finally, the influence of DLC film corrosionresistance by changing C target power was analyzed by electrochemical experiments.

Key words: Copper substrate, , Diamondlike carbon film, , Ranman spectroscopy, , Indentation method, , Corrosionresistance

王宁, 王静, 郑福卫, 武玉民, 侯保荣. 改变过渡层碳靶功率在铜上沉积类金刚石膜的研究[J]. 石油化工高等学校学报, 2015, 28(3): 91-96.

Wang Ning, Wang Jing,Zheng Fuwei,et al. DiamondLike Carbon Film Deposited on Copper Substrate by Changing Intermediate C Target Power[J]. Journal of Petrochemical Universities, 2015, 28(3): 91-96.

改变过渡层碳靶功率在铜上沉积类金刚石膜的研究

DiamondLike Carbon Film Deposited on Copper Substrate by Changing Intermediate C Target Power

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