TiO₂ self-cleaning films were prepared on the glass substrates by the self-made flame spray pyrolysis equipment with Ti(C₄H₉O₎₄ as precursor. The morphology, structure, light transmittance of the films were characterized respectively by scanning electron microscopy (SEM), X-ray diffraction (XRD), and ultraviolet-visible transmission spectrum (UV-Vis). And the photocatalysis and hydrophilicity of the films were investigated. The results show that the droplets formed liquid membranes first, and then became the solid films by thermal decomposition reaction. The films synthesized by the flame spray pyrolysis method are anatase titanium dioxide. And the influence of growth time and annealing temperature on the crystallinity，photocatalysis and self-cleaning properties of the films were discussed. The longer position time and the higher annealing temperature, the higher of the crystallinity, photocatalytic activity and hydrophilicity of the films. The light transmittance of the films annealing at 600 ℃,which were synthesized by flame spray pyrolysis method at 400 ℃, reach to over 70%. 