油扩散泵电磁加热系统的温控研究

梁健源，穆克，佀秀杰，王发科

Research on Temperature Control of Electromagnetic Heating System for Oil Diffusion Pump

Liang Jianyuan，Mu Ke，Si Xiujie，Wang Fake

辽宁石油化工大学学报 . 2019, (5): 93 -97 . DOI: 10.3969/j.issn.1672-6952.2019.05.017